Vacuum Systems: Product/Process Development

The primary goal of the Vacuum Systems Group is to form a partnership with the customer. Using the customer's knowledge of their own products and specifications, PADT combines this with its own expertise and tools to solve real-world problems and to develop world-class products. Some of the types of projects that the Vacuum Systems Group has assisted customers with include:

  • TMP Exploded View Conceptualization, design, and fabrication of sublimation sources
  • Utilization of fluid flow and heat transfer analysis to optimize designs for thermal uniformity and faster heating and cooling transients
  • Rapid Prototyping of system components for flow visualization testing, as well as assembly and structural testing
  • Redesign of components for cost reduction
  • Design, simulation, and testing of liquid delivery systems
  • Ultra-high and ultra-low temperature chamber and component design and analysis
  • Shape and configuration optimization of sputtering system magnet arrays for maximum target utilization
  • Optimization based on CFD analysis of baffles and showerheads for even gas distribution
  • Simulation to determine and correct causes of field-revealed failures

PADT has real-world experience with a variety of devices in the industry, including:

  • CVD Systems
  • PVD Systems
  • Etch Systems
  • Cathodes
  • Sublimation Sources
  • Wafer Platens
  • Showerheads
  • Heaters
  • Feedthroughs
  • Motion Systems
  • Cooling Systems
  • Optical Systems
  • Miniature Turbo Molecular Pumps
  • Susceptors
  • Wafer Holders & Handlers
  • HV & UHV Chambers, Assemblies, & Components
  • Bell Jars
  • Target Cranes
  • Thin Film Deposition Process Knowledge (ALD, CVD, PE CVD)
  • Photo Cathode & Vacuum Tube Assy, Design & Process Technology
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